Methods for Producing Fluorine-Containing Hydroxyaldehyde, Fluorine-Containing Propanediol, and Fluorine-Containing Alcohol Monomer
申请人:Central Glass Company, Limited
公开号:US20150361026A1
公开(公告)日:2015-12-17
As shown by the following reaction formula, disclosed is a fluorine-containing hydroxyaldehyde production method, including the step of obtaining a fluorine-containing hydroxyaldehyde represented by the general formula (1) by reacting a fluorine-containing ketone represented by the general formula (4) and an aldehyde represented by the general formula (5) in the presence of an organic base selected from a heterocyclic compound which contains a nitrogen atom in its ring or a tertiary amine. By this production method, it is possible to obtain the fluorine-containing hydroxyaldehyde in a high yield. Furthermore, it is possible to easily obtain in high yields a fluorine-containing propanediol, which is a derivative of this fluorine-containing hydroxyaldehyde, and a fluorine-containing alcohol monomer by using the same.
Polymerizable Fluoromonomer, Fluoropolymer, Resist Material, and Method of Pattern Formation
申请人:Komoriya Haruhiko
公开号:US20110244188A1
公开(公告)日:2011-10-06
Disclosed is a polymerizable fluoromonomer represented by the following general formula (1).
In the formula, R
1
represents a hydrogen atom, methyl group, fluorine atom, or trifluoromethyl group. n is an integer of 0 or 1, and m is that of from 1 to (3+n). R
2
and R
3
each independently represents a hydrogen atom or a protective group. A resist containing a fluoropolymer obtained by polymerizing or copolymerizing the monomer is suitable for use in microfabrication by immersion exposure or by a double patterning process based on immersion exposure.
Disclosed is a top coating composition formed on a resist film, for protecting the resist film, the top coating composition being a top coating composition for photoresist, characterized by containing a fluorine-containing polymer having a repeating unit represented by the following general formula (1). This composition is capable of controlling developing solution solubility and has a high water repellency.
[In the formula, R
1
represents a hydrogen atom, fluorine atom, methyl group or trifluoromethyl group, R
2
represents a heat-labile protecting group, R
3
represents a fluorine atom or fluorine-containing alkyl group, and W is a bivalent linking group.]
Disclosed is a water repellent additive for an immersion resist, which is composed of a fluorine-containing polymer that has a repeating unit represented by general formula (1). By adding the water repellent additive to a resist composition, the resist composition can be controlled to have high water repellency during exposure and to exhibit improved solubility in a developing solution during development.
[In the formula, R
1
represents a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group; R
2
represents a heat-labile protecting group; R
3
represents a fluorine atom or a fluorine-containing alkyl group; and W represents a divalent linking group.]
Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition, Top Coat Composition And Pattern Formation Method
申请人:Mori Kazunori
公开号:US20120077126A1
公开(公告)日:2012-03-29
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle.
In the formula, R
1
represents a polymerizable double bond-containing group; R
2
represents a fluorine atom or a fluorine-containing alkyl group; R
8
represents a substituted or unsubstituted alkyl group or the like; and W
1
represents a single bond, a substituted or unsubstituted methylene group or the like.