Ce(IV) Complexes with Donor-Functionalized Alkoxide Ligands: Improved Precursors for Chemical Vapor Deposition of CeO<sub>2</sub>
作者:Helen C. Aspinall、John Bacsa、Anthony C. Jones、Jacqueline S. Wrench、Kate Black、Paul R. Chalker、Peter J. King、Paul Marshall、Matthew Werner、Hywel O. Davies、Rajesh Odedra
DOI:10.1021/ic201593s
日期:2011.11.21
Thin films of ceria (CeO2) have many applications, and their synthesis by liquid-injection MOCVD (metal–organic chemical vapor deposition) or ALD (atomic layer deposition) requires volatile precursor compounds. Here we report the synthesis of a series of homoleptic and heteroleptic Ce(IV) complexes with donor-functionalized alkoxide ligands mmp (1-methoxy-2-methylpropan-2-olate), dmap (1-(dimethylamino)propan-2-olate)