申请人:Ciba-Geigy Corporation
公开号:US05627011A1
公开(公告)日:1997-05-06
The invention relates to the use of oxime sulfonates of formula 1 ##STR1## wherein R is naphthyl, ##STR2## Ar is an unsubstituted aryl group or an aryl group which carries one or more than one substituent selected from the group consisting of nitro, chloro, bromo, hydroxyl, C.sub.1 -C.sub.4 alkyl, C.sub.1 -C.sub.4 perfluoroalkyl, C.sub.1 -C.sub.4 alkoxy and acid degradable substituents; R.sub.0 is either a R.sub.1 --X group or R.sub.2 ; X is an oxygen or a sulfur atom; R.sub.1 is hydrogen, C.sub.1 -C.sub.4 alkyl or unsubstituted phenyl or phenyl which is substituted by a member selected from the group consisting of chloro, bromo, C.sub.1 -C.sub.4 alkyl and C.sub.1 -C.sub.4 alkoxy, and R.sub.2 is hydrogen, C.sub.1 -C.sub.4 alkyl or an acid-degradable substituent, as radiation-sensitive photoacid generator in a chemically amplified photoresist which is developable in alkaline medium and is sensitive to radiation of a wavelength in the range from 340-390 nm, and to corresponding positive-working and negative-working photoresists for the cited wavelength range.
本发明涉及使用公式1的肟磺酸盐,其中R为萘基,Ar为未取代的芳基或带有一种或多种取代基的芳基,所述取代基从硝基、氯、溴、羟基、C.sub.1-C.sub.4烷基、C.sub.1-C.sub.4全氟烷基、C.sub.1-C.sub.4烷氧基和酸可降解取代基中选择;R.sub.0为R.sub.1-X基团或R.sub.2,X为氧或硫原子;R.sub.1为氢、C.sub.1-C.sub.4烷基或未取代苯基或苯基,所述苯基被选自氯、溴、C.sub.1-C.sub.4烷基和C.sub.1-C.sub.4烷氧基的一种成员取代;R.sub.2为氢、C.sub.1-C.sub.4烷基或酸可降解取代基,作为一种化学增感光阻剂中的辐射敏感的光酸发生剂,所述化学增感光阻剂在碱性介质中可显影,并对波长在340-390nm范围内的辐射敏感,以及对应于所述波长范围的正向和负向光刻胶。