A polymer bearing specific silicon-containing groups is novel. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation and has excellent sensitivity and resolution at a wavelength of less than 300 nm, and high resistance to oxygen plasma etching. The resist composition lends itself to micropatterning for the fabrication of VLSIs.
一种具有特定
硅含基团的聚合物轴承是新颖的。以该聚合物为基础
树脂的抗蚀剂组合物对高能辐射敏感,在小于300纳米的波长下具有良好的敏感度和分辨率,并且对氧等离子体刻蚀具有很高的抵抗力。该抗蚀剂组合物适用于微型图案制作,用于制造VLSI。