The invention provides poly(3-mono- and 3,5-disubstituted-4-acetoxy- and 4-hydroxystyrenes) and copolymers therefrom having a molecular weight in the range of from about 1,000 to about 800,000 wherein said 3-mono and 3,5-substitution is independently C₁ to C₁₀ alkyl or alkoxy, primary or secondary amino, halogen (Br, Cl, I), NO₂ or SO₃H.
The polymers are used as a binder resin in photosensitive compositions, wherein the light-sensitive compound is an o-quinone diazide or as an acid-forming radiation-sensitive compound in combination with a compound cleavable by acid.
本发明提供分子量在约 1,000 至约 800,000 范围内的聚(3-单取代和 3,5- 二取代-4-乙酰氧基和
4-羟基苯乙烯)及其共聚物,其中所述 3-单取代和 3,5- 二取代独立地为 C₁ 至 C₁₀ 烷基或烷氧基、伯
氨基或仲
氨基、卤素(Br、Cl、I)、NO₂ 或 SO₃H。
这些聚合物可用作光敏组合物中的粘合剂
树脂,其中的光敏化合物是邻醌重
氮化物,或与可被酸裂解的化合物结合用作成酸辐射敏感化合物。