FLOURINE-CONTAINING COMPOUND, SUBSTRATE FOR PATTERNING, PHOTODEGRADABLE COUPLING AGENT, PATTERNING METHOD, AND COMPOUND
申请人:Kanagawa University
公开号:US20160152642A1
公开(公告)日:2016-06-02
A fluorine-containing compound represented by General formula (1), wherein X represents a halogen atom or an alkoxy group, R
1
represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, R
f1
and R
f2
are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more.
FLUORINE-CONTAINING COMPOUND, SUBSTRATE FOR PATTERN FORMATION, PHOTODEGRADABLE COUPLING AGENT, PATTERN FORMATION METHOD, AND COMPOUND
申请人:KANAGAWA UNIVERSITY
公开号:US20170158606A1
公开(公告)日:2017-06-08
A compound represented by formula (e):
where R
1
represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and R
f1
and R
f2
represent fluorinated alkoxy groups.
FLUORINE-CONTAINING COMPOUND, SUBSTRATE FOR PATTERN FORMATION, PHOTODEGRADABLE COUPLING AGENT, PATTERN FORMATION METHOD, AND COMPOUND
申请人:KANAGAWA UNIVERSITY
公开号:US20150168836A1
公开(公告)日:2015-06-18
A fluorine-containing compound represented by a following general formula (1) is provided. [In the general formula (1), X represents a halogen atom or an alkoxy group, R
1
represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and R
f1
and R
f2
represent fluorinated alkoxy groups. n represents an integer of 0 or greater. ]