RUTHENIUM COMPLEX, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING RUTHENIUM-CONTAINING THIN FILM
申请人:TOSOH CORPORATION
公开号:US20150303063A1
公开(公告)日:2015-10-22
The present invention is to provide a ruthenium complex represented by formula (1a), (2), (3), etc., which is useful for producing a ruthenium-containing thin film both under the conditions using an oxidizing gas as the reaction gas and under the conditions using a reducing gas as the reaction gas:
wherein R
1a
to R
7a
, R
8
, R
9
and R
10
to R
18
represents an alkyl group having a carbon number of 1 to 6, etc., and n represents an integer of 0 to 2.
US9349601B2
申请人:——
公开号:US9349601B2
公开(公告)日:2016-05-24
1,3,5-Tri-t-butylbenzene and Some Derivatives<sup>1</sup>
作者:Paul D. Bartlett、Max Roha、R. Martin Stiles
DOI:10.1021/ja01638a019
日期:1954.5
Colonge, Bulletin de la Societe Chimique de France, 1935, vol. <5>2, p. 61