Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition, Top Coat Composition And Pattern Formation Method
申请人:Mori Kazunori
公开号:US20120077126A1
公开(公告)日:2012-03-29
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle.
In the formula, R
1
represents a polymerizable double bond-containing group; R
2
represents a fluorine atom or a fluorine-containing alkyl group; R
8
represents a substituted or unsubstituted alkyl group or the like; and W
1
represents a single bond, a substituted or unsubstituted methylene group or the like.
Carbonsäureester auf Basis von 2-Hydroxymethylnorbornan
申请人:Celanese Chemicals Europe GmbH
公开号:EP1468982A1
公开(公告)日:2004-10-20
Die vorliegende Erfindung betrifft Carbonsäureester auf Basis von 2-Hydroxymethylnorbornan und aliphatischen Dicarbonsäuren der allgemeinen Formel
wobei A gleich (̵ CH2)̵x mit x = 1 - 10 bedeutet, ein Verfahren zu ihrer Herstellung sowie ihre Verwendung als Schmiermittel oder Weichmacher für thermoplastische Kunststoffe.