申请人:WAKO PURE CHEMICAL INDUSTRIES, LTD
公开号:EP0875789A1
公开(公告)日:1998-11-04
A resist composition comprising (a) a polymer having repeating units of the formula:
wherein R5, R6 and R7 are independently hydrogen, alkyl, cyano, alkyloxycarbonyl or carbamoyl; Z is a spacer or a direct link; and R is hydroxyalkyl having a protected terminal hydroxy, (b) a photoacid generator, and (c) a solvent, is effective for forming patterns using ArF excimer laser beams.
一种抗蚀剂组合物,包括(a)具有式中重复单元的聚合物:
其中 R5、R6 和 R7 独立地是氢、烷基、氰基、烷氧羰基或氨基甲酰基;Z 是间隔物或直接连接;R 是具有保护端羟基的羟烷基;(b) 光酸发生器;(c) 溶剂,可有效地使用 ArF 准分子激光束形成图案。