申请人:HASEGAWA Koji
公开号:US20090233242A1
公开(公告)日:2009-09-17
Lactone-containing compounds having formula (1) are novel wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or monovalent hydrocarbon groups, or R
2
and R
3
may together form an aliphatic hydrocarbon ring, R
4
is H or CO
2
R
5
, R
5
is a monovalent hydrocarbon group, W is CH
2
, O or S, and k
1
is 3, 4 or 5. They are useful as monomers to produce polymers which are transparent to radiation ≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent properties including resolution, LER, pattern density dependency and exposure margin.
含有式(1)的内酯化合物是新颖的,其中R1为H、F、甲基或三氟甲基,R2和R3为H或一价碳氢基团,或R2和R3可以共同形成脂肪烃环,R4为H或CO2R5,R5为一价碳氢基团,W为CH2、O或S,k1为3、4或5。它们可用作单体以生产对辐射≦500纳米透明的聚合物。包含这些聚合物作为基础树脂的辐射敏感抗蚀组合物表现出优异的性能,包括分辨率、LER、图案密度依赖性和曝光余量。