An actinic ray-sensitive or radiation-sensitive resin composition and a pattern forming method using the composition are provided, the composition including (A) a resin containing a repeating unit having a group represented by formula (1) as defined in the specification, the solubility of the resin in an alkali developer being increased by the action of an acid, and (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation. The repeating unit having the group represented by formula (1) being derived from a polymerizable compound represented by formula (M-1) as defined in the specification.
本发明提供了一种对辐射线敏感或辐射敏感的
树脂组合物和一种使用该组合物的图案形成方法,该组合物包括(A)一种含有重复单元的
树脂,该重复单元具有如说明书中所定义的式(1)所代表的基团,该
树脂在碱显影剂中的溶解度在酸的作用下增加,和(B)一种在辐射线或辐射照射下能产生酸的化合物。具有式(1)所代表基团的重复单元来自于说明书中定义的式(M-1)所代表的可聚合化合物。