A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
一种分子
玻璃化合物,包括(A)一种特定芳香化合物的四聚反应产物,该芳香化合物至少具有一个羟基,以及一种特定的多环或融合多环芳香醛;和(B)一种酸可移除的保护基,作为与芳香化合物的羟基和/或多环或融合多环芳香醛的羟基的加合物。还公开了一种包括该分子
玻璃化合物的光刻胶组合物,以及包括光刻胶组合物层的涂覆基板。