A positive resist composition comprises (A) a resin component which becomes soluble in an alkaline developer under the action of an acid and (B) an acid generator. The resin (A) is a polymer comprising specific recurring units, represented by formula (1). The acid generator (B) is a specific sulfonium salt compound. When processed by lithography, the composition is improved in resolution and forms a pattern with a satisfactory mask fidelity and a minimal LER.
Herein R1 is H or methyl, R2 is an acid labile group, R3 is CO2R4 when X is CH2, R3 is H or CO2R4 when X is O, R4 is a monovalent C1-C20 hydrocarbon group, and m is 1 or 2.
一种正性光阻组合物包括(A)
树脂组分,该组分在酸的作用下变得可溶于碱性显影剂,并且(B)酸发生剂。
树脂(A)是一种聚合物,包含特定的重复单元,由公式(1)表示。酸发生剂(B)是一种特定的
磺酸盐化合物。当通过光刻处理时,该组合物在分辨率方面得到改善,并形成具有令人满意的掩模保真度和最小LER的图案。其中,R1为H或甲基,R2为酸不稳定基团,当X为
CH2时,R3为CO2R4,当X为O时,R3为H或CO2R4,R4为单价的C1-C20烃基,m为1或2。