The present invention provides a negative photosensitive resin composition comprising (A) a photocurable resin having a photosensitive group or groups crosslinkable by light irradiation, (B) a photoacid generator and (C) a photosensitizer which is a benzopyran condensed ring compound capable of increasing photosensitivity to visible light with a wavelength of 480 nm or more,
a negative photosensitive dry film prepared by applying the photosensitive resin composition to a surface of support film, followed by drying, to form a photosensitive resin layer, and
a method of forming a pattern using the resin composition or the dry film.
本发明提供了一种阴性感光
树脂组合物,该组合物包括:(A) 光固化
树脂,该
树脂具有可通过光照射交联的一个或多个感光基团;(B) 光酸发生器;(C) 光敏剂,该光敏剂是一种苯并
吡喃缩合环化合物,能够提高对波长为 480 纳米或以上的可见光的感光度、
一种负感光干膜,制备方法是将感光
树脂组合物涂在支撑膜表面,然后干燥,形成感光
树脂层,以及
使用该
树脂组合物或干膜形成图案的方法。