Styrene derivatives of formula (1) are novel wherein R1 is H, F, C1-20 alkyl or fluorinated C1-20 alkyl, R2 in cis or trans conformation is F, C1-20 alkyl or fluorinated C1-20 alkyl, R3 is a phenol protecting group, p, q and r are integers in the range of 0≦p<5, 0≦q<5, 0
公式(1)的
苯乙烯衍
生物是新颖的,其中R1是H,F,C1-20烷基或
氟化C1-20烷基,cis或trans构型中的R2是F,C1-20烷基或
氟化C1-20烷基,R3是
苯酚保护基,p,q和r是整数,范围在0≤p<5,0≤q<5,0
生物获得的聚合物可用作抗蚀组合物的基础聚合物。