(2-norbornyl)methyl(2-oxocyclohexyl)sulfonium trifluoromethanesulfonate | 171292-12-9

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: (2-norbornyl)methyl(2-oxocyclohexyl)sulfonium trifluoromethanesulfonate
• 英文别名: 2-Bicyclo[2.2.1]heptanyl-methyl-(2-oxocyclohexyl)sulfanium;trifluoromethanesulfonate
• CAS: 171292-12-9
• 化学式: CF₃O₃S*C₁₄H₂₃OS
• 分子量: 388.472
• InChiKey: OQGRZXSBFFEBQJ-UHFFFAOYSA-M

计算性质

• 辛醇/水分配系数(LogP)：
  2.99
• 重原子数：
  24
• 可旋转键数：
  2
• 环数：
  3.0
• sp3杂化的碳原子比例：
  0.93
• 拓扑面积：
  83.6
• 氢给体数：
  0
• 氢受体数：
  7

文献信息

• COMPOUND, RESIN, MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, PATTERN FORMING METHOD, AND METHOD FOR PURIFYING THE COMPOUND OR RESIN
  申请人：Mitsubishi Gas Chemical Company, Inc.

  公开号：US20170073288A1

  公开（公告）日：2017-03-16

  The compound according to the present invention is represented by a specific formula. The compound according to the present invention has a structure according to the specific formula, and therefore can be applied to a wet process and is excellent in heat resistance and etching resistance. In addition, the compound according to the present invention has such a specific structure, and therefore has a high heat resistance, a relatively high carbon concentration, a relatively low oxygen concentration and also a high solvent solubility. Therefore, the compound according to the present invention can be used to form an underlayer film whose degradation is suppressed at high-temperature baking and which is also excellent in etching resistance to oxygen plasma etching or the like. Furthermore, the compound is also excellent in adhesiveness with a resist layer and therefore can form an excellent resist pattern.

  根据本发明，该化合物由特定的公式表示。根据本发明，该化合物具有特定公式的结构，因此可应用于湿法工艺，具有优异的耐热性和耐蚀性。此外，根据本发明，该化合物具有特定结构，因此具有高耐热性、相对较高的碳浓度、相对较低的氧浓度以及高溶剂溶解性。因此，根据本发明的化合物可用于形成在高温烘烤时降解受抑制且在氧等离子体蚀刻中具有优异耐蚀性的底层膜。此外，该化合物在与光阻层的粘附性方面也表现出色，因此可形成优异的光阻图案。
• Novel tertiary (meth)acrylates having lactone structure, polymers, resist compositions and patterning process
  申请人：Watanabe Takeru

  公开号：US20050250924A1

  公开（公告）日：2005-11-10

  Novel tertiary (meth)acrylate compounds having a lactone structure are polymerizable into polymers having improved transparency, especially at the exposure wavelength of an excimer laser and dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, have a high resolution, and lend themselves to micropatterning with electron beams or deep-UV rays.

  新型含有内酯结构的三元（甲基）丙烯酸酯化合物可聚合成具有改善透明度的聚合物，特别是在准分子激光的照射波长下以及干法刻蚀抗性方面。包括这些聚合物的抗蚀组合物对高能辐射敏感，具有高分辨率，并适用于电子束或深紫外线微图案化。
• ACRYLATE ESTER DERIVATIVES AND POLYMER COMPOUNDS
  申请人：NAKAYAMA Osamu

  公开号：US20120316349A1

  公开（公告）日：2012-12-13

  A cyclic alcohol of formula (II-1): wherein: R 2 , R 3 , and R 4 are each independently a hydrogen atom, a linear alkyl group comprising 1 to 6 carbon atoms, a branched alkyl group comprising 3 to 6 carbon atoms, or a cyclic alkyl group comprising 3 to 6 carbon atoms; or R 2 and R 3 or R 3 and R 4 combine to form an alkylene group comprising 3 to 6 carbon atoms; m is 1 or 2; R 5 , R 6 , R 7 , R 8 , R 9 , and R 10 are each independently a hydrogen atom, a linear alkyl group comprising 1 to 6 carbon atoms, a branched alkyl group comprising 3 to 6 carbon atoms, or a cyclic alkyl group comprising 3 to 6 carbon atoms; A is an oxygen atom; and B is an oxygen atom or a sulfur atom. In addition, a process for producing the cyclic alcohol of formula (II-1).

  一种化学式为(II-1)的环状醇：其中：R2、R3和R4分别独立地是氢原子、由1至6个碳原子组成的直链烷基基团、由3至6个碳原子组成的支链烷基基团或由3至6个碳原子组成的环状烷基基团；或者R2和R3或R3和R4结合形成由3至6个碳原子组成的亚烯基基团；m为1或2；R5、R6、R7、R8、R9和R10分别独立地是氢原子、由1至6个碳原子组成的直链烷基基团、由3至6个碳原子组成的支链烷基基团或由3至6个碳原子组成的环状烷基基团；A为氧原子；B为氧原子或硫原子。此外，一种制备化学式(II-1)的环状醇的方法。
• NEAR-INFRARED ABSORBING DYE, NEAR-INFRARED ABSORPTIVE FILM-FORMING COMPOSITION, AND NEAR-INFRARED ABSORPTIVE FILM
  申请人：OHASHI Masaki

  公开号：US20120119171A1

  公开（公告）日：2012-05-17

  A near-infrared absorbing dye has an anion of formula (1) wherein A 1 is H or CF 3 , R 0 is OH or —OC(═O)—R′, and R′ is a monovalent hydrocarbon group. The dye has excellent solvent solubility as well as good optical properties and heat resistance, offering the advantages of easy coating and effective working during film formation. The dye free of heavy metal in its structure is advantageously used in the process of fabricating semiconductor devices.

  一种近红外吸收染料具有如下式（1）的阴离子，其中A1为H或CF3，R0为OH或—OC(═O)—R′，而R′为一价碳氢基团。该染料具有优异的溶剂溶解性以及良好的光学性能和耐热性，提供易于涂覆和在薄膜形成过程中有效工作的优点。该染料在其结构中不含重金属，因此在制造半导体器件的过程中具有优势应用。
• MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, COMPOSITION FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY AND PATTERN FORMING METHOD
  申请人：Mitsubishi Gas Chemical Company, Inc.

  公开号：US20180101096A1

  公开（公告）日：2018-04-12

  A material for forming an underlayer film for lithography, in which a compound represented by the following formula (0) is used. (in formula (0), each X independently represents an oxygen atom or a sulfur atom, or a non-crosslinked state, R 1 represents a 2 n -valent group having 1 to 30 carbon atoms, or a single bond, each R 0 independently represents a straight, branched or cyclic alkyl group having 1 to 30 carbon atoms, an aryl group having 6 to 30 carbon atoms, a straight, branched or cyclic alkenyl group having 2 to 30 carbon atoms, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group or a hydroxyl group, the alkyl group, the alkenyl group and the aryl group each optionally include a cyanato group, a thiol group, a halogen group, a nitro group, an amino group, a carboxylic acid group, a hydroxyl group, an ether bond, a ketone bond or an ester bond, each m 1 is independently an integer of 0 to 4, in which at least one m 1 is an integer of 1 to 4, each m 2 is independently an integer of 0 to 3, n is an integer of 1 to 4, and each p is independently 0 or 1.)

  一种用于光刻的底层膜的材料，其中使用以下式(0)代表的化合物。(在式(0)中，每个X独立表示氧原子或硫原子，或非交联状态，R1表示具有1到30个碳原子的2n价基团，或者单键，每个R0独立表示具有1到30个碳原子的直链、支链或环烷基，具有6到30个碳原子的芳基，具有2到30个碳原子的直链、支链或环烯基，硫醇基，卤素基，硝基，氨基，羧基或羟基，烷基、烯基和芳基中每个可选包括氰酸基、硫醇基、卤素基、硝基、氨基、羧基、羟基、醚键、酮键或酯键，每个m1独立地为0到4的整数，其中至少一个m1为1到4的整数，每个m2独立地为0到3的整数，n为1到4的整数，每个p独立地为0或1。)