(METH)ACRYLATE ESTERS, STARTING ALCOHOLS FOR THE PREPARATION THEREOF, PROCESSES FOR PREPARING BOTH, POLYMERS OF THE ESTERS, CHEMICALLY AMPLIFIABLE RESIST COMPOSITIONS, AND METHOD FOR FORMING PATTERNS
申请人:Mitsubishi Rayon Co., Ltd.
公开号:EP1352904A1
公开(公告)日:2003-10-15
The (meth)acrylate of the present invention is represented by the following formula (1). The (meth)acrylate can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between 1,3-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol. A polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition.
wherein each of R1, R2, R3 and R4 represents a hydrogen atom, a methyl group or an ethyl group; either one of x1 or x2 represents a (meth)acryloyloxy group and the other represents a hydrogen atom; both A1 and A2 represent hydrogen atoms, or A1 and A2 form -O-, -CH2- or -CH2CH2-.
本发明的(甲基)丙烯酸酯由下式(1)表示。生产(甲基)丙烯酸酯的方法是:首先通过还原 1,3-二烯和马来酸酐之间的 Diels-Alder 反应得到的加成产物来生产内酯,然后将内酯水合生成醇,再对醇进行(甲基)丙烯化反应。通过(共)聚合包含本发明(甲基)丙烯酸酯的单体组合物生产的聚合物在透明度、耐干蚀性和在有机溶剂中的溶解性方面都非常出色,因此最好用作化学放大抗蚀剂组合物的树脂。
其中 R1、R2、R3 和 R4 各代表氢原子、甲基或乙基;x1 或 x2 中的一个代表(甲基)丙烯酰氧基,另一个代表氢原子;A1 和 A2 均代表氢原子,或 A1 和 A2 形成 -O-、-CH2- 或 -CH2CH2-。