MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20150322027A1
公开(公告)日:2015-11-12
A monomer (1) is prepared by reacting a compound (9) with a base or metal to form a metal enolate reagent, and reacting the metal enolate reagent with an acyloxyketone compound (8). A polymer derived from the monomer is used as base resin to formulate a resist composition, which is shelf stable and displays a high dissolution contrast, controlled acid diffusion and low roughness in forming positive pattern via alkaline development and in forming negative pattern via organic solvent development.
Method for manufactruring β-(meth)acryloyloxy-γ-butyrolactones
申请人:JNC CORPORATION
公开号:US09346775B2
公开(公告)日:2016-05-24
The art relates to provision of a method for manufacturing an (meth)acrylic polymerizable monomer that can be used in various applications, such as an optical material, a resist material, a coating material and a laminate material, and provision of a new β-(meth)acryloyloxy-γ-butyrolactone compound by applying the manufacturing method. The method for manufacturing the β-(meth)acryloyloxy-γ-butyrolactone compound is described, in which a (meth)acrylate compound having a carbonyl group and a ketene compound are condensed and isomerized. Further, the manufacturing method is applied to the new β-(meth)acryloyloxy-γ-butyrolactone compound.
Cross-linkable, electrically conductive composition, electric conductor and process for forming the same
申请人:NITTO CHEMICAL INDUSTRY CO., LTD.
公开号:EP0837112A2
公开(公告)日:1998-04-22
An anticorrosive composition comprising (a') an acidic group-containing, self-doping type soluble, electrically conducting polymer.
一种防腐组合物,包含 (a') 一种含酸性基团、自掺杂型可溶性导电聚合物。
CROSS-LINKABLE CONDUCTIVE COMPOSITION, CONDUCTOR, AND PROCESS FOR FORMING THE SAME
申请人:NITTO CHEMICAL INDUSTRY CO., LTD.
公开号:EP0844284A1
公开(公告)日:1998-05-27
The first of this invention is a cross-linkable, electrically conductive composition comprising (a) a soluble, electrically conducting polymer having a sulfonic acid group and/or a carboxyl group and (b) a compound having at least two functional groups capable of reacting with the sulfonic acid group and/or carboxyl group of the soluble, electrically conducting polymer (a).