RUTHENIUM COMPLEX, PROCESS FOR PRODUCING THE SAME AND PROCESS FOR PRODUCING THIN FILM
申请人:TOSOH CORPORATION
公开号:US20030088116A1
公开(公告)日:2003-05-08
A ruthenium-containing thin film is produced by the chemical vapor deposition method etc. with the use of an organometallic ruthenium compound represented by the general formula (1), specific example of which is (2,4-dimethyl-pentadienyl)(ethylcyclopentadienyl) ruthenium:
1
or an organometallic ruthenium compound represented by the general formula (7), specific example of which is carbonylbis(2-methyl-1,3-pentadiene) ruthenium:
2
as the precursor.
Preparation of mono-aryl-substituted methylene-bridged substituted cyclopentadienyl-fluorenyl ligands and zirconium complexes derived thereof
申请人:Total Petrochemicals Research Feluy
公开号:EP2204375A1
公开(公告)日:2010-07-07
The present invention discloses efficient methods for preparing mono-aryl-substituted cyclopentadienyl-fluorenyl catalyst components and their use in the isotactic polymerisation of propylene with very high productivity.
CH-Aktivierungsreaktionen an substituierten Zirconocenkomplexen und deren Verwendung in der katalytischen Ethylenpolymerisation
作者:Andrea I Licht、Helmut G Alt
DOI:10.1016/s0022-328x(03)00508-4
日期:2003.11
Zirconocene dichloride complexes with substituents containing aliphatic end groups at the aromatic ligands react with two equivalents of n-butyllithium to give metallacyclic zirconocene complexes via aliphatic CH-activation reactions. As well as ω-alkenyl substituted zirconocene dichloride complexes with terminal aliphatic groups as zirconocene dichloride complexes with purely aliphatic substituents
在芳族配体上具有包含脂族端基的取代基的二茂锆二茂合物与二当量的正丁基锂反应,通过脂族CH活化反应生成金属环茂锆茂配合物。具有末端脂族基团的ω-烯基取代的二氧化锆茂金属配合物以及具有纯脂族取代基的二氯化锆茂金属配合物也适用于此类金属环的合成。与甲基铝氧烷(MAO)结合使用时,这些金属环对于乙烯聚合而言是极好的催化剂。它们的活性可以是相应的二茂锆二氯化物离析物的活性的三倍半。催化剂25 / MAO能够生产2640 kg PE g -1 Zr h(60°C,戊烷溶液,10 bar乙烯压力)。
LANTHANUM COMPOUND, METHOD OF SYNTHESIZING LANTHANUM COMPOUND, LANTHANUM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM, AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE
申请人:PARK Gyu-hee
公开号:US20170008914A1
公开(公告)日:2017-01-12
A silicon-containing intermediate is synthesized by reacting a lanthanum tris[bis(trialkylsilyl)amide] complex with an alkylcyclopentadiene. A lanthanum compound is synthesized by reacting the silicon-containing intermediate with a dialkylamidine-based compound.
Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD
申请人:Tanaka Kikinzoku Kogyo K.K.
公开号:US06476247B1
公开(公告)日:2002-11-05
The disclosed is a method of producing two organic ruthenium compounds; i.e., bis(ethylcyclopentadienyl)ruthenium and (alkylcyclopentadienyl)cyclopentadienylruthenium, which are useful for producing thin film through CVD. In one aspect, the invention provides a method for producing bis(ethylcyclopentadienyl)ruthenium, including hydrogenating bis(acetylcyclopentadienyl)ruthenium in the presence of a catalyst. In another aspect, the invention provides a method of producing (alkylcyclopentadienyl)cyclopentadienylruthenium, including acylating bis(cyclopentadienyl)ruthenium with carboxylic anhydride in the presence of phosphoric acid as a catalyst, to thereby produce (acylcyclopentadienyl)cyclopentadienylruthenium, and reducing the (acylcyclopentadienyl)cyclopentadienyl ruthenium.