Processes for the preparation of organoluthenium compounds useful for thin film formation by CVD
申请人:Tanaka Kikinzoku Kogyo K.K.
公开号:US06476247B1
公开(公告)日:2002-11-05
The disclosed is a method of producing two organic ruthenium compounds; i.e., bis(ethylcyclopentadienyl)ruthenium and (alkylcyclopentadienyl)cyclopentadienylruthenium, which are useful for producing thin film through CVD. In one aspect, the invention provides a method for producing bis(ethylcyclopentadienyl)ruthenium, including hydrogenating bis(acetylcyclopentadienyl)ruthenium in the presence of a catalyst. In another aspect, the invention provides a method of producing (alkylcyclopentadienyl)cyclopentadienylruthenium, including acylating bis(cyclopentadienyl)ruthenium with carboxylic anhydride in the presence of phosphoric acid as a catalyst, to thereby produce (acylcyclopentadienyl)cyclopentadienylruthenium, and reducing the (acylcyclopentadienyl)cyclopentadienyl ruthenium.
本发明涉及一种制备两种有机钌化合物的方法;即双(乙基环戊二烯基)钌和(烷基环戊二烯基)环戊二烯基钌,这些化合物有利于通过化学气相沉积法制备薄膜。在一方面,本发明提供了一种制备双(乙基环戊二烯基)钌的方法,包括在催化剂存在下加氢双(乙酰基环戊二烯基)钌。在另一方面,本发明提供了一种制备(烷基环戊二烯基)环戊二烯基钌的方法,包括在磷酸存在下,用羧酸酐酰化双(环戊二烯基)钌,从而制得(酰基环戊二烯基)环戊二烯基钌,并还原(酰基环戊二烯基)环戊二烯基钌。