Novel sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
申请人:——
公开号:US20040167322A1
公开(公告)日:2004-08-26
A chemical amplification type resist composition comprising a specific benzenesulfonyldiazomethane containing a long-chain alkoxyl group at the 2-position on benzene ring has many advantages including improved resolution, improved focus latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris left after coating, development and peeling, and improved pattern profile after development and is thus suited for microfabrication.
Palladium-Catalyzed Dimerization of Vinyl Ethers to Acetals
作者:Changle Chen、Richard F. Jordan
DOI:10.1021/ja104523y
日期:2010.8.4
and silyl vinylethers to beta,gamma-unsaturated CH(2)=CHCH(2)CH(OR)(2) acetals, and they cyclize divinyl ethers to analogous cyclic acetals. A plausible mechanism comprises in situ generation of an active PdOR alkoxide species, double vinylether insertion to generate PdCH(2)CH(OR)CH(2)CH(OR)(2)} species, and beta-OR elimination to generate the acetal product. In the presence of vinylethers, (alpha-diimine)PdCl(+)
Nucleophilic Addition to Acetylenes in Superbasic Catalytic Systems: XIV. Vinilation of Diols in a System CsF-NaOH
作者:L. A. Oparina、M. Ya. Khil’ko、N. A. Chernyshova、S. I. Shaikhudinova、L. N. Parshina、Th. Preiss、J. Henkelmann、B. A. Trofimov
DOI:10.1007/s11178-005-0223-x
日期:2005.5
A new catalytic system CsF-NaOH was developed for the synthesis of mono- and divinyl ethers of alkanediols exceeding in efficiency KOH. The nucleophilic addition of diols to acetylene in the presence of this system occurs both at enhance pressure (without solvent, 140–160°C) and atmospheric pressure (in DMSO medium, 100°C) of acetylene. Conditions were established of a selective preparation in a high yield of divinyl ethers from diols.
Novel sulfonyldiazomethanes, photoacid generations, resist compositions, and patterning process
申请人:——
公开号:US20030180653A1
公开(公告)日:2003-09-25
A chemical amplification type resist composition contains as a photoacid generator a sulfonyldiazomethane compound of formula (1) wherein R is H or C
1-4
alkyl or alkoxy, G is SO
2
or CO, R
3
is C
1-10
alkyl or C
6-14
aryl, p is 1 or 2, q is 0 or 1, p+q=2, n is 0 or 1, m is 3 to 11, and k is 0 to 4. The composition is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution and improved pattern profile after development.
1
Novel sulfonydiazomethanes, photoacid generators, resist compositions, and patterning process
申请人:——
公开号:US20040033432A1
公开(公告)日:2004-02-19
Sulfonyldiazomethane compounds containing a long-chain alkyl- or alkoxy-naphthyl group are novel and useful as photoacid generators. Chemical amplification type resist compositions comprising the same are suited for microfabrication because of many advantages including improved resolution, improved focus latitude, and minimized line width variation or shape degradation even on long-term PED.