RAW MATERIAL FOR FORMING THIN FILM BY ATOMIC LAYER DEPOSITION METHOD AND METHOD FOR PRODUCING THIN FILM
申请人:ADEKA CORPORATION
公开号:US20210155638A1
公开(公告)日:2021-05-27
Provided is a thin-film forming raw material, which is used in an atomic layer deposition method, including a magnesium compound represented by the following general formula (1):
where R
1
represents an isopropyl group, a sec-butyl group, or a tert-butyl group. A thin-film containing a magnesium atom is produced on a surface of a substrate with high productivity through use of the raw material.
[EN] MONO-SUBSTITUTED CYCLOPENTADIENES AND METAL CYCLOPENTADIENYL COMPLEXES AND SYNTHESIS METHODS THEREOF<br/>[FR] CYCLOPENTADIÈNES MONO-SUBSTITUÉS ET COMPLEXES MÉTAL-CYCLOPENTADIÉNYLE ET PROCÉDÉS DE SYNTHÈSE ASSOCIÉS
申请人:AIR LIQUIDE
公开号:WO2022035795A1
公开(公告)日:2022-02-17
Disclosed are mono-substituted cydopentadienes, metal cydopentadienyl complexes and methods for synthesizing them. The disclosed mono-substituted cydopentadienes are synthesized by a selective catalytic carbon-carbon coupling reaction. The disclosed metal cydopentadienyl complexes are synthesized from the disclosed mono-substituted cydopentadienes. The disclosed metal cydopentadienyl complexes include main group metal and transition metal cydopentadienyl complexes, and may be used as deposition precursors contained in film forming compositions for film depositions in semiconductor industry, such as ALD, CVD, SOD, etc.
A Simple and Convenient Synthesis of 5-Alkyl-Substituted 3-Isopropenyl- and 3-Acetyltropolones
作者:Kimiaki Imafuku、Kiyomi Arai
DOI:10.1055/s-1989-27300
日期:——
2-Alkyl-substituted 6,6-dimethylfulvenes 3a-d, prepared by alkaline condensation of alkylcyclopentadienes 2a-d with acetone, react with dichloroketene to give 2-alkyl-substituted 7,7-dichloro-4-isopropyl-idenebicyclo[3.2.0]hept-2-en-6-ones 4a-d. The cycloadducts 4a-d are hydrolyzed in aqueous acetic acid in the presence of sodium acetate to give 5-alkyl-substituted 3-isopropenyltropolones (2-hydroxy-3-isopropenyl-2,4,6-cycloheptatrienones) 5a-d. These 3-isopropenyltropolones 5a-d are hydrogenated on 5% palladium-charcoal to afford 5-alkyl-3-isopropyltropolones 6a-d and treated with hydrazoic acid to give 5-alkyl-3-acetyltropolones 7a-d.