申请人:IDEMITSU KOSAN COMPANY LIMITED
公开号:EP1577285A1
公开(公告)日:2005-09-21
Provided is an adamantane derivative represented by Formula (I) or (II):
wherein X represents a halogen atom; Y represents an alkyl group having 1 to 10 carbon atoms, a halogenated alkyl group having 1 to 10 carbon atoms, a halogen atom or a hetero atom-containing group; R1 to R4 represent independently hydrogen, a halogen atom, an alkyl group having 1 to 10 carbon atoms or a halogenated alkyl group having 1 to 10 carbon atoms; m represents an integer of 0 to 15, and n represents an integer of 0 to 10; and excluded is a case where in Formula (I), m and n are 0 at the same time and R3 and R4 are a hydrogen atom at the same time.
Capable of being provided is a novel adamantane derivative which is useful as a modifying agent for a resin for a photoresist and a dry etching resistance-improving agent in the photolithography field, agricultural and medical intermediates and other various industrial products.
本发明提供了一种由式(I)或(II)表示的金刚烷衍生物:
其中 X 代表卤素原子;Y 代表具有 1 至 10 个碳原子的烷基、具有 1 至 10 个碳原子的卤代烷基、卤素原子或含杂原子的基团;R1 至 R4 独立地代表氢、卤素原子、具有 1 至 10 个碳原子的烷基或具有 1 至 10 个碳原子的卤代烷基;m代表0至15的整数,n代表0至10的整数;不包括式(I)中m和n同时为0,R3和R4同时为氢原子的情况。
本发明可提供一种新型金刚烷衍生物,该衍生物可用作光刻胶树脂的改性剂、光刻领域的干蚀刻抗性改进剂、农业和医药中间体以及其他各种工业产品。