申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20200387069A1
公开(公告)日:2020-12-10
Disclosed are a salt represented by formula (1), and a quencher and a resist composition comprising the same:
wherein R
1
, R
2
and R
3
each independently represent a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and —CH
2
— included in the hydrocarbon group may be replaced by —O— or —CO—, m1, m2 and m3 represent an integer of 0 to 4, and when m1, m2 and/or m3 are 2 or more, a plurality of R
1
, a plurality of R
2
and/or a plurality of R
3
may be the same or different from each other, and X
1
represents —CO—, —SO— or —SO
2
—.
公开了一种由式(1)表示的盐,以及包括该盐的淬灭剂和抗蚀组合物:其中R1、R2和R3分别独立表示卤素原子、具有1至6个碳原子的烷基氟基或具有1至18个碳原子的碳氢基,而包含在碳氢基中的—CH2—可被—O—或—CO—替代,m1、m2和m3代表0至4的整数,当m1、m2和/或m3为2或更多时,多个R1、多个R2和/或多个R3可能相同或不同,X1表示—CO—、—SO—或—SO2—。