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作者:Furlani, Anita、Hornemann, Karl Heinz、Russo, Maria Vittoria、Villa, Angiola Chiesi、Guastini, Carlo
DOI:——
日期:——
PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, ACTIVE-LIGHT-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM AND MASK BLANK
申请人:FUJIFILM Corporation
公开号:US20170121437A1
公开(公告)日:2017-05-04
A pattern forming method includes forming a film using an actinic ray-sensitive or radiation-sensitive resin composition, exposing the film with active light or radiation, and developing the exposed film using a developer including an organic solvent, in which the actinic ray-sensitive or radiation-sensitive resin composition contains a compound having a partial structure represented by General Formula (I).
Bicev,P. et al., Gazzetta Chimica Italiana, 1973, vol. 103, p. 849 - 858