According to the present invention, a resist resin having in its structure a specific bridged-bond-containing aliphatic ring, and a resist composition comprising the same are provided. By using this resist composition, a resist pattern excellent in both transparency against short-wavelength light and dry-etching resistance can be formed by alkali development with high resolution.
根据本发明,提供了一种在其结构中具有特定桥式键含有的脂环的抗蚀
树脂,以及包括该
树脂的抗蚀组合物。通过使用这种抗蚀组合物,可以通过高分辨率的碱性显影形成对短波长光具有优异透明度和干法刻蚀抗性的抗蚀图案。