申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US20210149302A1
公开(公告)日:2021-05-20
A resist composition including a compound (D0) represented by general formula (d0) and a polymeric compound (A10) having a structural unit (a0) derived from a compound represented by general formula (a0-1) shown below (in formula (d0), n represents an integer of 2 or more; in formula (a0-1), W
1
represents a polymerizable group-containing group; C
t
represents a tertiary carbon atom, and the α-position of C
t
is a carbon atom which constitutes a carbon-carbon unsaturated bond; R
11
represents an aromatic hydrocarbon group which may have a substituent, or a chain hydrocarbon group; R
12
and R
13
each independently represents a chain hydrocarbon group, or R
12
and R
13
are mutually bonded to form a cyclic group