9-Pentacyclo[6.3.1.13,6.02,7.09,11]tridecanyl 2-methylprop-2-enoate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: 9-Pentacyclo[6.3.1.13,6.02,7.09,11]tridecanyl 2-methylprop-2-enoate
• 英文别名: 9-pentacyclo[6.3.1.13,6.02,7.09,11]tridecanyl 2-methylprop-2-enoate
• 化学式: C₁₇H₂₂O₂
• 分子量: 258.35
• InChiKey: KRZMBZMWRXFEJH-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  4
• 重原子数：
  19
• 可旋转键数：
  3
• 环数：
  5.0
• sp3杂化的碳原子比例：
  0.82
• 拓扑面积：
  26.3
• 氢给体数：
  0
• 氢受体数：
  2

文献信息

• POLYMER, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
  申请人：SHIN-ETSU CHEMICAL CO., LTD.

  公开号：US20160168296A1

  公开（公告）日：2016-06-16

  A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers under such illumination that the quantity of light of wavelength up to 400 nm is up to 0.05 mW/cm 2 . The polymer avoids photo-decomposition of the acid generator during polymerization and concomitant deprotection reaction of the acid labile group when used in positive resist compositions. A pattern with high dissolution contrast and rectangularity is formed after development.
• US8703408B2
  申请人：——

  公开号：US8703408B2

  公开（公告）日：2014-04-22