[5-[3,3,3-Trifluoro-2-(fluoromethyl)-2-hydroxypropyl]-2-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: [5-[3,3,3-Trifluoro-2-(fluoromethyl)-2-hydroxypropyl]-2-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate
• 英文别名: [5-[3,3,3-trifluoro-2-(fluoromethyl)-2-hydroxypropyl]-2-bicyclo[2.2.1]heptanyl] 2-methylprop-2-enoate
• 化学式: C₁₅H₂₀F₄O₃
• 分子量: 324.31
• InChiKey: WWLBNBLNPQYQCR-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3.6
• 重原子数：
  22
• 可旋转键数：
  6
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.8
• 拓扑面积：
  46.5
• 氢给体数：
  1
• 氢受体数：
  7

文献信息

• RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, POLYMER AND POLYMERIZABLE COMPOUND
  申请人：JSR Corporation

  公开号：US20160179003A1

  公开（公告）日：2016-06-23

  A radiation-sensitive resin composition includes a first polymer including an acid-labile group, an acid generator to generate an acid upon exposure to radiation, and a second polymer including a fluorine atom and a functional group shown by a general formula (x). The second polymer has a fluorine atom content higher than a fluorine atom content of the first polymer. R 1 represents an alkali-labile group. A represents an oxygen atom, —NR′—, —CO—O— # or —SO 2 —O— ## , wherein the oxygen atom represented by A is not an oxygen atom bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group, R′ represents a hydrogen atom or an alkali-labile group, and “#” and “##” each indicate a bonding hand bonded to R 1 . -A-R 1 (x)

  一种辐射敏感的树脂组合物，包括第一聚合物，其中包括酸敏感基团，酸发生剂用于在辐射照射下生成酸，以及第二聚合物，其中包括氟原子和通过通用公式（x）所示的功能基团。第二聚合物的氟原子含量高于第一聚合物的氟原子含量。R1代表碱解基团。A代表氧原子，-NR′-，-CO-O-＃或-SO2-O-##，其中由A表示的氧原子不是直接与芳香环，羰基团或亚砜基团结合的氧原子，R′代表氢原子或碱解基团，“＃”和“##”分别表示与R1结合的键手。-A-R1（x）
• Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
  申请人：JSR Corporation

  公开号：EP2781959A2

  公开（公告）日：2014-09-24

  A radiation-sensitive resin composition includes (A) a polymer that includes an acid-labile group, (B) an acid generator that generates an acid upon exposure to radiation, and (C) a polymer that includes a fluorine atom and a functional group shown by the following general formula (x), the polymer (C) having a fluorine atom content higher than that of the polymer (A).         — A—R1     (x) wherein R1 represents an alkali-labile group, and A represents an oxygen atom (excluding an oxygen atom that is bonded directly to an aromatic ring, a carbonyl group, or a sulfoxyl group), an imino group, -CO-O-*, or -SO2-O-* (wherein "*" indicates a bonding hand bonded to R1).

  一种辐射敏感树脂组合物包括：(A) 含有酸亲和基的聚合物；(B) 在辐射照射下产生酸的酸发生器；(C) 含有氟原子和以下通式 (x) 所示官能团的聚合物，聚合物 (C) 的氟原子含量高于聚合物 (A)。 - A-R1 (x) 其中 R1 代表耐碱基团，A 代表氧原子（不包括直接与芳香环、羰基或亚磺酰基键合的氧原子）、亚氨基、-CO-O-* 或 -SO2-O-* （其中 "*"表示与 R1 键合的键手）。
• US8728706B2
  申请人：——

  公开号：US8728706B2

  公开（公告）日：2014-05-20