[3,5-Bis(1,1,1,3-tetrafluoro-2-hydroxypropan-2-yl)cyclohexyl] 2-methylprop-2-enoate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: [3,5-Bis(1,1,1,3-tetrafluoro-2-hydroxypropan-2-yl)cyclohexyl] 2-methylprop-2-enoate
• 英文别名: [3,5-bis(1,1,1,3-tetrafluoro-2-hydroxypropan-2-yl)cyclohexyl] 2-methylprop-2-enoate
• 化学式: C₁₆H₂₀F₈O₄
• 分子量: 428.31
• InChiKey: DJALUOWNKLFACZ-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3.8
• 重原子数：
  28
• 可旋转键数：
  7
• 环数：
  1.0
• sp3杂化的碳原子比例：
  0.81
• 拓扑面积：
  66.8
• 氢给体数：
  2
• 氢受体数：
  12

文献信息

• POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：SHIN-ETSU CHEMICAL CO., LTD.

  公开号：US20150064626A1

  公开（公告）日：2015-03-05

  A positive resist composition is provided comprising a polymer comprising recurring units having a carboxyl and/or phenolic hydroxyl group substituted with an acid labile group and recurring units of tert-butyl or tert-amyl-substituted hydroxyphenyl methacrylate and having a weight average molecular weight of 1,000-500,000. The resist composition has a satisfactory effect of suppressing acid diffusion and a high resolution, and forms a pattern of good profile and minimal edge roughness after exposure.
• US9063413B2
  申请人：——

  公开号：US9063413B2

  公开（公告）日：2015-06-23
• US9335632B2
  申请人：——

  公开号：US9335632B2

  公开（公告）日：2016-05-10