Fluorine-Containing Compounds and Their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions
申请人:Central Glass Company, Limited
公开号:US20140171584A1
公开(公告)日:2014-06-19
A fluorine-containing compound represented by the formula 1,
where R
1
is a methyl group or trifluoromethyl group,
each of R
2
and R
3
is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond,
l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and
when at least one of R
1
, R
2
and R
3
is in a plural number, the at least one of R
1
, R
2
and R
3
may be identical with or different from each other.