(1-Ethylcyclopentyl) 5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: (1-Ethylcyclopentyl) 5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate
• 英文别名: (1-ethylcyclopentyl) 5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate
• 化学式: C₁₆H₂₂O₄
• 分子量: 278.34
• InChiKey: QHEOEYFLGVNKDS-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  2.5
• 重原子数：
  20
• 可旋转键数：
  4
• 环数：
  4.0
• sp3杂化的碳原子比例：
  0.88
• 拓扑面积：
  52.6
• 氢给体数：
  0
• 氢受体数：
  4

文献信息

• Resist composition, and method of forming resist pattern
  申请人：TOKYO OHKA KOGYO CO., LTD.

  公开号：US11256169B2

  公开（公告）日：2022-02-22

  A resist composition containing a resin component having a structural unit containing a group which is dissociated under the action of an acid and compound represented by the general formula (bd1). In the formula (bd1), Rx1 to Rx4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, Ry1 to Ry2 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure, and Rz1 to Rz4 represent a hydrocarbon group or a hydrogen atom or may be mutually bonded to form a ring structure. At least one of Rx1 to Rx4, Ry1 to Ry2 and Rz1 to Rz4 has an anion group, the entire anion moiety may be an n-valent anion, and Mm+ represents an m-valent organic cation

  一种抗蚀剂组合物，含有一种树脂成分，其结构单元含有一个在酸作用下可离解的基团和通式（bd1）所代表的化合物。在通式（bd1）中，Rx1 至 Rx4 代表烃基或氢原子，或可相互键合形成环状结构；Ry1 至 Ry2 代表烃基或氢原子，或可相互键合形成环状结构；Rz1 至 Rz4 代表烃基或氢原子，或可相互键合形成环状结构。Rx1至Rx4、Ry1至Ry2和Rz1至Rz4中至少有一个具有阴离子基团，整个阴离子分子可以是n价阴离子，Mm+代表m价有机阳离子。
• RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
  申请人：TOKYO OHKA KOGYO CO., LTD.

  公开号：US20200174369A1

  公开（公告）日：2020-06-04

  A resist composition including a compound (D0) represented by general formula (d0) and a resin component (A1) has a structural unit (a0) in which a compound represented by general formula (a0-1) has a polymerizable group within the W 1 portion converted into a main chain (in formula (d0), Rd 01 represents a fluorine atom or a fluorinated alkyl group; In formula (a0-1), W 1 represents a polymerizable group-containing group; C t represents a tertiary carbon atom, and the α-position of C t is a carbon atom which constitutes a carbon-carbon unsaturated bond; R 11 represents an aromatic hydrocarbon group; or a chain hydrocarbon group; R 12 and R 13 each independently represents a chain hydrocarbon group, or R 12 and R 13 are mutually bonded to form a cyclic group).