Provided are a resin composition for underlayer film formation with which a variation hardly occurs in the line width distribution after processing due to a small thickness of a residual film after mold pressing, a layered product, a method for forming a pattern, an imprint forming kit, and a process for producing a device.
Disclosed is a resin composition for underlayer film formation which is used to form an underlayer film by being applied onto a base material, including a first resin having a radical reactive group in the side chain, a second resin containing at least one selected from a fluorine atom and a silicon atom, and a solvent. The second resin is preferably a resin containing a fluorine atom. The radical reactive group of the first resin is preferably a (meth)acryloyl group.
本发明提供了一种用于底层成膜的
树脂组合物、一种分层产品、一种图案形成方法、一种压印形成套件和一种设备生产工艺。
本发明公开了一种用于形成底层膜的
树脂组合物,该组合物通过涂敷在基底材料上形成底层膜,包括侧链中具有自由基反应基团的第一
树脂、至少含有一个
氟原子和一个
硅原子的第二
树脂以及溶剂。第二种
树脂最好是含有
氟原子的
树脂。第一种
树脂的自由基活性基团最好是(甲基)
丙烯酰基。