申请人:FUJI PHOTO FILM CO., LTD.
公开号:US20030044715A1
公开(公告)日:2003-03-06
A positive photoresist composition comprises: a compound capable of generating an acid upon irradiation with an actinic ray or a radiation, in which the compound contains (A1) a sulfonate compound of a sulfonium, and (A2) a sulfonate compound of an N-hydroxyimide or a disulfonyldiazomethane compound; and a resin capable of decomposing by the action of an acid to increase the solubility in an alkali developing solution, in which the resin contains a repeating unit having a specific lactone structure.
一种正性光刻胶组合物包括:一种在光射线或辐射照射下能够产生酸的化合物,其中该化合物包含(A1)一种锍的磺酸盐化合物和(A2)一种 N-羟基亚胺或二磺酰二氮甲烷化合物的磺酸盐化合物;以及一种能够在酸的作用下分解以增加在碱显影液中溶解度的树脂,其中该树脂包含具有特定内酯结构的重复单元。