Synthesis and coordination chemistry of perfluoroalkyl-derivatised β-diketonates
摘要:
A series of fluorinated beta-diketones, RfC(O)CH2C(O)R-f, (R-f = C6F13, R-f, = CF3; R-f = R-f, = C6F13, C7F15), have been prepared in reasonable yields by a two-step synthesis. On reaction with appropriate metal substrates, deprotonation and concurrent coordination of the perfluoroalkyl-derivatised beta-diketonate ligands affords a range of fluorous metal complexes which have been characterised by elemental analysis, mass spectrometry, IR and NMR spectroscopies. The structures of [Cu(L-L)(2)(H2O)(2)] {L-L= CF3C(O)CHC(O)C6F13, C6F13C(O)CHC(O)C6F13} and [Cu(PPh3)(2){C7F15C(O)CHC(O)C7F15}] have been determined by single-crystal X-ray diffraction. (C) 2002 Elsevier Science B.V. All rights reserved.
METAL ALKOXIDE COMPOUND, THIN-FILM-FORMING MATERIAL, METHOD FOR PRODUCING THIN FILM, AND ALCOHOL COMPOUND
申请人:ADEKA CORPORATION
公开号:US20150175642A1
公开(公告)日:2015-06-25
Disclosed is a metal alkoxide compound having physical properties suitable for a material for forming thin films by CVD, and particularly, a metal alkoxide compound having physical properties suitable for a material for forming metallic-copper thin films. A metal alkoxide compound is represented by general formula (I). A thin-film-forming material including the metal alkoxide compound is described as well. (In the formula, R
1
represents a methyl group or an ethyl group, R
2
represents a hydrogen atom or a methyl group, R
3
represents a C
1-3
linear or branched alkyl group, M represents a metal atom or a silicon atom, and n represents the valence of the metal atom or silicon atom.
ORGANOMETALLIC COMPOUND AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING THE SAME
申请人:SAMSUNG ELECTRONICS CO., LTD.
公开号:US20210388010A1
公开(公告)日:2021-12-16
An organometallic compound and a method of manufacturing an integrated circuit (IC) device, the organometallic compound being represented by Formula (I),
一种有机金属化合物和一种制造集成电路(IC)器件的方法,该有机金属化合物由式(I)表示,
ALUMINUM COMPOUND AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
申请人:Samsung Electronics Co., Ltd.
公开号:US20200207790A1
公开(公告)日:2020-07-02
Provided are an aluminum compound and a method for manufacturing a semiconductor device using the same. The aluminum compound may be represented by Formula 1.
提供了一种铝化合物以及使用它制造半导体器件的方法。该铝化合物可用公式1表示。
ALKOXIDE COMPOUND, RAW MATERIAL FOR FORMING THIN FILM, METHOD FOR MANUFACTURING THIN FILM, AND ALCOHOL COMPOUND
申请人:ADEKA CORPORATION
公开号:US20170121358A1
公开(公告)日:2017-05-04
An alkoxide compound is represented by General Formula (I) below:
wherein R
1
to R
3
each independently represent hydrogen, a C
1-12
hydrocarbon group, etc.; R
4
represents a C
1-12
hydrocarbon group, etc.; L represents hydrogen, halogen, a hydroxyl group, an amino group, an azi group, a phosphido group, a nitrile group, a carbonyl group, a C
1-12
hydrocarbon group, etc.; and M represents a metal atom or a silicon atom, n represents an integer of 1 or more, m represents an integer of 0 or more, and n+m represents the valence of the metal atom or silicon atom.
THIN-FILM FORMING RAW MATERIAL FOR USE IN ATOMIC LAYER DEPOSITION METHOD, THIN-FILM FORMING RAW MATERIAL, METHOD FOR PRODUCING THIN-FILM, AND COMPOUND
申请人:ADEKA CORPORATION
公开号:US20210340162A1
公开(公告)日:2021-11-04
The present invention provides a thin-film forming raw material, which is used in an atomic layer deposition method, including a compound represented by the following general formula (1):
where R
1
to R
4
each independently represent an alkyl group having 1 to 5 carbon atoms, and A
1
represents an alkanediyl group having 1 to 5 carbon atoms.