The present invention provides an organic compound for CVD raw material prepared by mixing a first organometallic compound and at least one second organometallic compound, said first organometallic compound having a central metal atom and at least one ligand coordinated thereto and said second organic compound having the same central metal as that of the first organometallic compound and at least one different ligand coordinated thereto from the ligand of the first organometallic compound, wherein the first and second organometallic compounds differ in decomposition behavior. In particular, a CVD raw material having both easy handling and good adhesiveness to thin film, which have not been so far sufficiently compatible with each other, can be obtained by mixing a cyclopentadienyl complex or a derivative thereof as the first organometallic compound, and a β-diketonato compound as the second organometallic compound.
本发明提供了一种有机化合物,用于CVD原料的制备,通过混合第一有机
金属化合物和至少一种第二有机
金属化合物制备而成。第一有机
金属化合物具有中心
金属原子和至少一个
配体与之配位,第二有机化合物具有与第一有机
金属化合物相同的中心
金属,并且与第一有机
金属化合物的
配体不同。其中,第一和第二有机
金属化合物在分解行为上存在差异。特别地,通过将
环戊二烯基配合物或其衍
生物作为第一有机
金属化合物,将β-二
酮类化合物作为第二有机
金属化合物混合,可以获得既易于处理又具有良好薄膜附着性的CVD原料,这两种性质以前还没有被充分兼容。