申请人:Shipley Company, L.L.C.
公开号:US20030207200A1
公开(公告)日:2003-11-06
The present invention relates to new polymers that contain repeat units of phenol and photoacid-labile esters that contain an alicyclic group, preferably a bulky group that suitably may contain 7 to about 20 carbons, such as an alkyladamantyl, ethylfencyl, tricyclo decanyl, or pinanyl group. Polymers of the invention are useful as a component of chemically-amplified positive-acting resists.
本发明涉及含有苯酚和光酸解性酯重复单元的新型聚合物,该酯含有脂环族基团,优选为适当含有7至约20个碳的笨重基团,例如烷基金刚烷基、乙基芬烷基、三环癸烷基或蒎烷基。本发明的聚合物可作为化学增强型正向感光胶的组分使用。