[EN] ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM AND PATTERN FORMING METHOD, EACH USING THE SAME<br/>[FR] COMPOSITION DE RÉSINE SENSIBLE AUX RAYONNEMENTS OU SENSIBLE AUX RAYONS ACTINIQUES, ET FILM SENSIBLE AUX RAYONNEMENTS OU SENSIBLE AUX RAYONS ACTINIQUES, ET PROCÉDÉ DE FORMATION DE MOTIF, CHACUN DE CEUX-CI UTILISANT LADITE COMPOSITION
申请人:FUJIFILM CORP
公开号:WO2013100158A1
公开(公告)日:2013-07-04
An actinic ray-sensitive or radiation-sensitive resin composition, which is excellent in sensitivity, resolution, a pattern profile and a depth of focus (DOF), and, an actinic ray-sensitive or radiation-sensitive film and a pattern forming method, each using the same, are provided. The actinic ray-sensitive or radiation-sensitive resin composition includes a nitrogen-containing compound and a resin (Ab) capable of varying a polarity or an alkali solubility thereof by the action of an acid.