Optically active compound and photosensitive resin composition
申请人:——
公开号:US20030211421A1
公开(公告)日:2003-11-13
A photoactive compound is used in combination with a photosensitizer, represented by the following formula (1):
A
−[(
J
)
m
−(
X-Pro
)]
n
(1)
wherein A represents a hydrophobic unit comprising at least one kind of hydrophobic groups selected from a hydrocarbon group and a heterocyclic group, J represents a connecting group, X-Pro represents a hydrophilic group protected by a protective group Pro which is removable by light exposure, m represents 0 or 1, and n represents an integer of not less than 1.
The protective group Pro may be removable by light exposure in association with the photosensitizer (especially, a photo acid generator), or may be a hydrophobic protective group. The hydrophilic group may be a hydroxyl group or a carboxyl group. The photoactive compound has high sensitivity to a light source of short wavelength beams, for resist application, therefore, the photoactive compound is advantageously used for forming a pattern with high resolution.
一种光活性化合物与光敏剂结合使用,由以下公式(1)表示:
A
−[(
J
)
m
−(
X-Pro
)]
n
(1)
其中,A代表至少包括一种从烃基和杂环基中选择的疏水基的疏水单元,J代表连接基团,X-Pro代表由光照可去除的保护基团Pro保护的亲水基团,m代表0或1,n代表不少于1的整数。
保护基团Pro可以与光敏剂(特别是光酸发生剂)一起通过光照可去除,也可以是疏水保护基团。亲水基团可以是羟基或羧基。光活性化合物对短波长光源具有很高的敏感性,用于光刻应用,因此,该光活性化合物有利于形成具有高分辨率的图案。
Design and Synthesis of New Polymeric Materials for Organic Nonvolatile Electrical Bistable Storage Devices: Poly(biphenylmethylene)s
作者:Matthias Beinhoff、Luisa D. Bozano、J. Campbell Scott、Kenneth R. Carter
DOI:10.1021/ma049572k
日期:2005.5.1
The synthesis of new polymers, poly(biphenylmethylene)s, derived from bistriflates of bisphenol-type monomers, by Ni(0)-mediated polymerization has been presented. These polymers are interesting because of the nature of the polymer backbone that contains biphenyl units separated by substituted methylene units. The solubility, mechanical properties, and electrical properties of the polymers can be altered
The synthesis of new polymers, poly(biphenylmethylene)s, derived from bistriflates of bisphenol-type monomers, by Ni(0)-mediated polymerization has been presented. These polymers are interesting because of the nature of the polymer backbone that contains biphenyl units separated by substituted methylene units. The solubility, mechanical properties, and electrical properties of the polymers can be altered
Composition for film formation and material for insulating film formation
申请人:JSR CORPORATION
公开号:US20020172652A1
公开(公告)日:2002-11-21
A composition for film formation capable of forming a coating film excellent in low dielectric constant characteristics, cracking resistance, modulus of elasticity, and adhesion to substrates and useful as an interlayer insulating film material in semiconductor devices, etc. The composition for film formation contains (A) at least one member selected from an aromatic polyarylene and an aromatic poly (arylene ether), (B) a polyvinylsiloxane, and (C) an organic solvent.
Nickel‐Catalyzed Reductive C−Ge Coupling of Aryl/Alkenyl Electrophiles with Chlorogermanes
作者:Pei‐Feng Su、Ke Wang、Xuejing Peng、Xiaobo Pang、Peng Guo、Xing‐Zhong Shu
DOI:10.1002/anie.202112876
日期:2021.12.13
A new C−Ge bond-forming framework was established, which bridges a gap between a recently developed mild coupling technique and organogermane chemistry. The method provides a mild approach for the synthesis of both aryl and alkenyl germanes, with improved molecular diversity and structural complexity, using readily available carbon electrophiles and chlorogermanes as starting materials.
Diyne-containing (co) polymer, processes for producing the same, and cured film
申请人:JSR Corporation
公开号:EP1099719A1
公开(公告)日:2001-05-16
A diyne-containing (co)polymer which is soluble in organic solvents, has excellent processability, and gives a cured coating film excellent in heat resistance, solvent resistance, low-dielectric characteristics, and mechanical strength; processes for producing the same; and a cured film.
The diyne-containing (co)polymer contains at least 10 mol% repeating units represented by the following formula (1) and has a weight-average molecular weight of from 500 to 1,000,000:
wherein Y represents a specific bivalent organic group; Ar represents a bivalent organic group; and n represents 0 or 1.