申请人:SAGEHASHI Masayoshi
公开号:US20110250539A1
公开(公告)日:2011-10-13
A fluorinated monomer has formula (1) wherein R
1
is H, F, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
4
to R
6
each are a monovalent fluorinated hydrocarbon group, A is a divalent hydrocarbon group, and k
1
is 0, 1 or 2. A polymer derived from the fluorinated monomer may be endowed with appropriate water repellency, water slip, acid lability and hydrolysis and is useful as an additive polymer in formulating a resist composition.