Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. The polymers of the composition being formed by reacting a polymeric metal alkoxide with an organic compound, said polymeric metal alkoxide including recurring units having the formula
wherein M is a metal, and each L is individually selected from the group consisting of diketo and alkoxide ligands; and said organic compound comprising a functional group for coordinating with M of said polymeric metal alkoxide. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.
提供了抗反射组合物和使用这些组合物形成电路的方法。这些组合物包括溶解或分散在溶剂体系中的聚合物。该组合物的聚合物是通过聚合
金属烷氧基化合物与有机化合物反应形成的,所述聚合
金属烷氧基化合物包括具有以下式子的递归单元
其中 M 是
金属,每个 L 单独选自二酮
配体和烷氧基
配体组成的组;所述有机化合物包括与所述聚合
金属烷氧基化合物的 M 配位的官能团。由此得到的组合物与旋转碗兼容(即在微光刻工艺的烘烤阶段之前或室温储存期间不会发生交联),可湿显影,并具有优异的光学特性。