A chemical amplification system negative-working resist composition for an electron beam and/or an X-ray, which is excellent in sensitivity and resolution and has a rectangular profile, comprising an alkali-soluble resin having structural units represented by the following general formula (a), a compound generating an acid by irradiation of the electron beam or the X-ray, and a crosslinking agent which initiates crosslinking by the acid:
一种用于电子束和/或 X 射线的
化学放大系统负工作抗蚀剂组合物,具有优异的灵敏度和分辨率,并具有矩形轮廓,由具有下式(a)所代表结构单元的碱溶性
树脂、通过电子束或 X 射线辐照产生酸的化合物以及通过酸引发交联的
交联剂组成: