申请人:Daicel Chemical Industries, Ltd.
公开号:EP1172384A1
公开(公告)日:2002-01-16
A polymeric compound of the invention includes at least one monomer unit selected from the following formulae (I), (II), (III) and (IV):
(wherein R1 is a hydrogen atom or a methyl group, R2 and R3 are each a hydrogen atom, a hydroxyl group or a -COOR4 group, where R4 is, e.g., a t-butyl group or a 2-tetrahydropyranyl group; R5 and R6 are each a hydrogen atom, a hydroxyl group or an oxo group; R7, R8 and R9 are each a hydrogen atom or a methyl group; R10 and R11 are each a hydrocarbon group having 1 to 8 carbon atoms; R12, R13 and R14 are each a hydrogen atom, a hydroxyl group or a methyl group, where if all of R12 to R14 are each a hydrogen atom or a hydroxyl group, R10 and R11 are not coincidentally methyl groups) [wherein, when the compound includes, for example, a monomer unit of Formula (III), the compound further includes at least one monomer unit selected from among, for example, a monomer unit represented by the following Formula (V):
(wherein R15 and R16 are each a hydrogen atom, a hydroxyl group or a carboxyl group; R17 is a hydroxyl group, an oxo group or a carboxyl group; and R1 has the same meaning as defined above)]. This polymeric compound has high etching resistance, as well as satisfactory transparency, alkali-solubility and adhesion, and is therefore useful as a photoresist resin.
本发明的聚合化合物包括至少一种选自下式 (I)、(II)、(III) 和 (IV) 的单体单元:
(其中 R1 为氢原子或甲基,R2 和 R3 各为氢原子、羟基或-COOR4 基团,其中 R4 例如为R5和R6各自为氢原子、羟基或氧代基团;R7、R8和R9各自为氢原子或甲基;R10和R11各自为具有1至8个碳原子的烃基;R12、R13 和 R14 各为氢原子、羟基或甲基,其中如果所有 R12 至 R14 各为氢原子或羟基,则 R10 和 R11 不同时为甲基)[其中,当该化合物包括例如式(III)的单体单元时,该化合物进一步包括至少一个选自例如下式(V)所代表的单体单元的单体单元:
(其中 R15 和 R16 各为氢原子、羟基或羧基;R17 为羟基、氧代基团或羧基;R1 的含义与上述定义相同)]。这种聚合化合物具有很高的抗蚀刻性,以及令人满意的透明度、碱溶解性和粘附性,因此可用作光阻树脂。