Alicyclic methacrylate compounds having an oxygen substituent group on their &agr;-methyl group, represented by formula (1), are novel wherein R
1
is H or C
1
-C
10
alkyl which may contain a halogen atom, hydroxyl group, ether bond, carbonyl group, carboxyl group or cyano group, and R
2
is a monovalent C
3
-C
20
organic group having an alicyclic structure. Polymers prepared from these alicyclic methacrylate compounds have improved transparency, especially at the exposure wavelength of an excimer laser, and improved dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, show a high resolution, allow smooth development, lend themselves to micropatterning, and are thus suitable as micropatterning material for VLSI fabrication.
1
具有氧取代基的环状
甲基丙烯酸酯化合物在其α-甲基基团上,由式(1)表示,其中R1是H或C1-C10烷基,可能包含卤素原子,羟基,醚键,羰基,羧基或
氰基,而R2是具有环状结构的一价C3-C20有机基团。从这些环状
甲基丙烯酸酯化合物制备的聚合物具有改善的透明度,特别是在准分子激光的曝光波长下,以及改善的干法蚀刻抗性。包含这些聚合物的抗蚀剂组合物对高能辐射敏感,具有高分辨率,允许平滑开发,适用于微图案制作,因此适用于VLSI制造的微图案材料。