Alicyclic methacrylate having oxygen substituent group on alpha-methyl
申请人:——
公开号:US20040176630A1
公开(公告)日:2004-09-09
Alicyclic methacrylate compounds having an oxygen substituent group on their &agr;-methyl group, represented by formula (1), are novel wherein R
1
is H or C
1
-C
10
alkyl which may contain a halogen atom, hydroxyl group, ether bond, carbonyl group, carboxyl group or cyano group, and R
2
is a monovalent C
3
-C
20
organic group having an alicyclic structure. Polymers prepared from these alicyclic methacrylate compounds have improved transparency, especially at the exposure wavelength of an excimer laser, and improved dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, show a high resolution, allow smooth development, lend themselves to micropatterning, and are thus suitable as micropatterning material for VLSI fabrication.
1
ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE RESIN COMPOSITION, AND ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE FILM AND PATTERN FORMING METHOD USING THE SAME
申请人:KAWABATA Takeshi
公开号:US20120082939A1
公开(公告)日:2012-04-05
An active light ray sensitive or radioactive ray sensitive resin composition which satisfies high sensitivity, high resolution, good pattern configuration, and good line edge roughness at the same time to a great extent, while having sufficiently good outgassing performance during exposure, and an active light ray sensitive or radioactive ray sensitive film formed by using the composition, and a pattern-forming method, are provided.
The active light ray sensitive or radioactive ray sensitive resin composition according to the present invention includes a resin (P) containing a repeating unit (A) which decomposes by irradiation with active light ray or radioactive ray to generate an acid, and a repeating unit (C) containing a primary or secondary hydroxyl group.
申请人:Commonwealth Scientific and Industrial Research
Organisation
公开号:EP2287671A1
公开(公告)日:2011-02-23
The invention pertains to processes for forming coated substrates, including photoresist coated substrates, comprising a low polydispersity acrylic polymer and a photoactive component.
本发明涉及形成涂层基底(包括光阻涂层基底)的工艺,该基底由低聚散性丙烯酸聚合物和光活性成分组成。
Low-polydispersity photoimageable acrylic polymers, photoresists and processes for microlithography
申请人:Farnham Brown William
公开号:US20050119378A1
公开(公告)日:2005-06-02
The invention pertains to low polydispersity acrylic polymers useful for photoimaging and photoresist compositions, and to the photoimaging processes which use these compositions. The low polydispersity polymers of this invention are prepared using controlled radical polymerization (CRP) techniques, such as RAFT (reversible addition fragmentation chain transfer) polymerization.