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1-adamantyl α-(hydroxymethyl)acrylate | 380379-88-4

中文名称
——
中文别名
——
英文名称
1-adamantyl α-(hydroxymethyl)acrylate
英文别名
1-Adamantyl 2-(hydroxymethyl)prop-2-enoate
1-adamantyl α-(hydroxymethyl)acrylate化学式
CAS
380379-88-4
化学式
C14H20O3
mdl
——
分子量
236.311
InChiKey
CZYSGNSKFHREOO-UHFFFAOYSA-N
BEILSTEIN
——
EINECS
——
  • 物化性质
  • 计算性质
  • ADMET
  • 安全信息
  • SDS
  • 制备方法与用途
  • 上下游信息
  • 反应信息
  • 文献信息
  • 表征谱图
  • 同类化合物
  • 相关功能分类
  • 相关结构分类

计算性质

  • 辛醇/水分配系数(LogP):
    2.5
  • 重原子数:
    17
  • 可旋转键数:
    4
  • 环数:
    4.0
  • sp3杂化的碳原子比例:
    0.79
  • 拓扑面积:
    46.5
  • 氢给体数:
    1
  • 氢受体数:
    3

上下游信息

  • 上游原料
    中文名称 英文名称 CAS号 化学式 分子量

反应信息

点击查看最新优质反应信息

文献信息

  • Alicyclic methacrylate having oxygen substituent group on alpha-methyl
    申请人:——
    公开号:US20040176630A1
    公开(公告)日:2004-09-09
    Alicyclic methacrylate compounds having an oxygen substituent group on their &agr;-methyl group, represented by formula (1), are novel wherein R 1 is H or C 1 -C 10 alkyl which may contain a halogen atom, hydroxyl group, ether bond, carbonyl group, carboxyl group or cyano group, and R 2 is a monovalent C 3 -C 20 organic group having an alicyclic structure. Polymers prepared from these alicyclic methacrylate compounds have improved transparency, especially at the exposure wavelength of an excimer laser, and improved dry etching resistance. Resist compositions comprising the polymers are sensitive to high-energy radiation, show a high resolution, allow smooth development, lend themselves to micropatterning, and are thus suitable as micropatterning material for VLSI fabrication. 1
    具有氧取代基的环状甲基丙烯酸酯化合物在其α-甲基基团上,由式(1)表示,其中R1是H或C1-C10烷基,可能包含卤素原子,羟基,醚键,羰基,羧基或氰基,而R2是具有环状结构的一价C3-C20有机基团。从这些环状甲基丙烯酸酯化合物制备的聚合物具有改善的透明度,特别是在准分子激光的曝光波长下,以及改善的干法蚀刻抗性。包含这些聚合物的抗蚀剂组合物对高能辐射敏感,具有高分辨率,允许平滑开发,适用于微图案制作,因此适用于VLSI制造的微图案材料。
  • ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE RESIN COMPOSITION, AND ACTIVE LIGHT RAY SENSITIVE OR RADIOACTIVE RAY SENSITIVE FILM AND PATTERN FORMING METHOD USING THE SAME
    申请人:KAWABATA Takeshi
    公开号:US20120082939A1
    公开(公告)日:2012-04-05
    An active light ray sensitive or radioactive ray sensitive resin composition which satisfies high sensitivity, high resolution, good pattern configuration, and good line edge roughness at the same time to a great extent, while having sufficiently good outgassing performance during exposure, and an active light ray sensitive or radioactive ray sensitive film formed by using the composition, and a pattern-forming method, are provided. The active light ray sensitive or radioactive ray sensitive resin composition according to the present invention includes a resin (P) containing a repeating unit (A) which decomposes by irradiation with active light ray or radioactive ray to generate an acid, and a repeating unit (C) containing a primary or secondary hydroxyl group.
    提供了一种活性光线敏感或放射线敏感的树脂组合物,其在很大程度上同时满足高灵敏度、高分辨率、良好的图案配置和良好的线边粗糙度,同时在曝光期间具有足够好的排气性能,以及使用该组合物形成的活性光线敏感或放射线敏感薄膜和形成图案的方法。本发明的活性光线敏感或放射线敏感的树脂组合物包括含有重复单元(A)的树脂(P),该重复单元通过活性光线或放射线辐射分解生成酸,并且含有主要或次要羟基的重复单元(C)。
  • Process for forming a coated substrate
    申请人:Commonwealth Scientific and Industrial Research Organisation
    公开号:EP2287671A1
    公开(公告)日:2011-02-23
    The invention pertains to processes for forming coated substrates, including photoresist coated substrates, comprising a low polydispersity acrylic polymer and a photoactive component.
    本发明涉及形成涂层基底(包括光阻涂层基底)的工艺,该基底由低聚散性丙烯酸聚合物和光活性成分组成。
  • Low-polydispersity photoimageable acrylic polymers, photoresists and processes for microlithography
    申请人:Farnham Brown William
    公开号:US20050119378A1
    公开(公告)日:2005-06-02
    The invention pertains to low polydispersity acrylic polymers useful for photoimaging and photoresist compositions, and to the photoimaging processes which use these compositions. The low polydispersity polymers of this invention are prepared using controlled radical polymerization (CRP) techniques, such as RAFT (reversible addition fragmentation chain transfer) polymerization.
    本发明涉及可用于光成像和光刻胶组合物的低多分散性丙烯酸聚合物,以及使用这些组合物的光成像工艺。本发明的低多分散性聚合物采用受控自由基聚合(CRP)技术制备,例如 RAFT(可逆加成片段链转移)聚合。
  • LOW-POLYDISPERSITY PHOTOIMAGEABLE ACRYLIC POLYMERS, PHOTORESISTS AND PROCESSES FOR MICROLITHOGRAPHY
    申请人:E.I. DUPONT DE NEMOURS AND COMPANY
    公开号:EP1664927A1
    公开(公告)日:2006-06-07
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