POLYMER, RESIST COMPOSITION, AND PATTERN FORMING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20160229940A1
公开(公告)日:2016-08-11
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer.
METHOD FOR PRODUCING POLYMER
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20170097567A1
公开(公告)日:2017-04-06
A polymer comprising recurring units having an acid generator bound to the backbone, and recurring units having an optionally acid labile group-substituted carboxyl group and/or recurring units having an optionally acid labile group-substituted hydroxyl group is obtained by polymerizing corresponding monomers in a solution of a non-polymerizable compound containing a nitrogen atom to which an acid labile group is bound. This prevents deprotection reaction of the acid labile group in the case of positive resist-forming polymer or crosslinking reaction in the case of negative resist-forming polymer.
Structure of physoperuvine
作者:A. R. Pinder
DOI:10.1021/jo00140a002
日期:1982.9
Structure and synthesis of physoperuvine: x-ray crystal and molecular structures of the n-benzoyl derivatives of (±)-3- and (+)-4-methylaminocycloheptanone
作者:Andrew T. Mcphail、A. Reginald Pinder
DOI:10.1016/s0040-4020(01)91114-7
日期:1984.1
Single-crystal X-ray analyses have defined the structures and solid-state conformations of (±)-N-benzoyl-3-methylaminocycloheptanone [(±)-]and (+)-N-benzoyl-4-methylaminocycloheptanone [(±)]. Resolution of (±)-[4- methylaminocycloheptanone α 1-hydroxytropane]to yield the (+)-enantiomer. Identical in all respects with the free base from natural (+)-physoperuvine, was achieved via the di-p-toluoyl-(+)-tartrate