申请人:Nissan Chemical Corporation
公开号:EP3706156A1
公开(公告)日:2020-09-09
There is provided a laminated body for separating an object to be processed by cutting or the like, or for processing, for example, polishing a back surface of a water, the laminated body comprising an intermediate layer that is disposed between a support and the object to be processed and peelably adheres to the support and the object to be processed, wherein the intermediate layer includes at least a peeling layer in contact with the support, and the peeling layer contains a novolac resin that absorbs light with a wavelength of 190 nm to 600 nm incident through the support, resulting in modification, and a material and a method for separation without mechanical load.
A laminated body for polishing a back surface of a wafer, the laminated body comprising an intermediate layer that is disposed between a support and a circuit surface of the wafer and peelably adheres to the support and the circuit surface, wherein the intermediate layer includes an adhesion layer in contact with the wafer and a peeling layer in contact with the support, and the peeling layer contains a novolac resin that absorbs light with a wavelength of 190 nm to 600 nm incident through the support, resulting in modification. The light transmittance of the peeling layer at a wavelength range of 190 nm to 600 nm may be 1 to 90%. The modification caused by absorption of light may be photodecomposition of the novolac resin.
提供了一种层压体,用于通过切割等方式分离待加工物体,或用于加工,例如,抛光水的背面,层压体包括中间层,该中间层设置在支撑物和待加工物体之间,并可剥离地粘附在支撑物和待加工物体上、其中,中间层至少包括一个与支撑物接触的剥离层,剥离层含有一种酚醛树脂,可吸收通过支撑物入射的波长为 190 纳米至 600 纳米的光,从而产生改性效果,以及一种无需机械负荷即可分离的材料和方法。
一种用于抛光晶片背面的层压体,该层压体包括中间层,该中间层设置在晶片的支撑件和电路表面之间,并可剥离地粘附在支撑件和电路表面上,其中,中间层包括与晶片接触的粘附层和与支撑件接触的剥离层,剥离层包含一种酚醛树脂,该酚醛树脂可吸收通过支撑件入射的波长为 190 纳米至 600 纳米的光,从而产生改性效果。剥离层在 190 纳米至 600 纳米波长范围内的透光率可达 1%至 90%。光吸收引起的改性可能是酚醛树脂的光分解。