Disclosed is a polymerizable fluoromonomer represented by the following general formula (1).
In the formula, R
1
represents a hydrogen atom, methyl group, fluorine atom, or trifluoromethyl group. n is an integer of 0 or 1, and m is that of from 1 to (3+n). R
2
and R
3
each independently represents a hydrogen atom or a protective group. A resist containing a fluoropolymer obtained by polymerizing or copolymerizing the monomer is suitable for use in microfabrication by immersion exposure or by a double patterning process based on immersion exposure.
本发明涉及一种可聚合的含
氟单体,其通式(1)如下所示。其中,R1代表氢原子、甲基基团、
氟原子或三
氟甲基基团。n为0或1的整数,m为1至(3+n)的整数。R2和R3各自独立地代表氢原子或保护基团。通过聚合或共聚合该单体得到的含
氟聚合物的抗蚀剂适用于浸润曝光或基于浸润曝光的双重图案化工艺的微细加工。