COBALT COMPLEX, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING COBALT-CONTAINING THIN FILM
申请人:TOSOH CORPORATION
公开号:US20220017553A1
公开(公告)日:2022-01-20
To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas.
A cobalt complex represented by the following formula (1):
L
1
-Co-L
2
(1)
wherein L
1
and L
2
represent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C):
wherein R
1
and R
2
represent a C
1-6
alkyl group or a tri(C
1-6
alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;
wherein R
3
represents a tri(C
1-6
alkyl)silyl group, R
4
and R
5
represent a C
1-4
alkyl group, and X represents a C
1-6
alkylene group;
wherein R
6
and R
8
represent a C
1-6
alkyl group, R
7
represents a hydrogen atom or a C
1-4
alkyl group, Y represents an oxygen atom or NR
9
, Z represents an oxygen atom or NR
10
, and R
9
and R
10
independently represent a C
1-6
alkyl group.
METAL ALKOXIDE COMPOUND, THIN-FILM-FORMING MATERIAL, METHOD FOR PRODUCING THIN FILM, AND ALCOHOL COMPOUND
申请人:ADEKA CORPORATION
公开号:US20150175642A1
公开(公告)日:2015-06-25
Disclosed is a metal alkoxide compound having physical properties suitable for a material for forming thin films by CVD, and particularly, a metal alkoxide compound having physical properties suitable for a material for forming metallic-copper thin films. A metal alkoxide compound is represented by general formula (I). A thin-film-forming material including the metal alkoxide compound is described as well. (In the formula, R
1
represents a methyl group or an ethyl group, R
2
represents a hydrogen atom or a methyl group, R
3
represents a C
1-3
linear or branched alkyl group, M represents a metal atom or a silicon atom, and n represents the valence of the metal atom or silicon atom.
METHOD FOR PRODUCING BIPHENYLTETRACARBOXYLIC ACID TETRAESTER
申请人:Nishio Masayuki
公开号:US20110137069A1
公开(公告)日:2011-06-09
Disclosed is a method for producing a biphenyltetracarboxylic acid ester by oxidative coupling a phthalic acid ester by using a catalyst comprising at least a palladium salt, a copper salt and a β-dicarbonyl compound in the presence of a molecular oxygen, wherein the β-dicarbonyl compound is supplied into a reaction mixture liquid intermittently at an interval of less than 30 minutes, or continuously. This method allows, in particular, the selective and economical production of an asymmetric biphenyltetracarboxylic acid tetraester such as 2,3,3′,4′-biphenyltetracarboxylic acid tetraester.
ORGANOMETALLIC COMPOUND AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING THE SAME
申请人:SAMSUNG ELECTRONICS CO., LTD.
公开号:US20210388010A1
公开(公告)日:2021-12-16
An organometallic compound and a method of manufacturing an integrated circuit (IC) device, the organometallic compound being represented by Formula (I),
An organocatalytic C–C bond cleavage approach: a metal-free and peroxide-free facile method for the synthesis of amide derivatives
作者:Nagaraju Vodnala、Raghuram Gujjarappa、Saibabu Polina、Vanaparthi Satheesh、Dhananjaya Kaldhi、Arup K. Kabi、Chandi C. Malakar
DOI:10.1039/d0nj04158k
日期:——
A facile organocatalytic approach has been devised towards the synthesis of amide derivatives using 1,3-dicarbonyls as easily available acyl-sources under peroxide-free reaction conditions. This transformation was accomplished by the cleavage of the C–C bond in the presence of TEMPO as an organocatalyst and excludes the use of transition-metals and harsh reaction conditions. A broad range of substrates