申请人:Wako Pure Chemical Industries, Ltd.
公开号:US05250669A1
公开(公告)日:1993-10-05
Photosensitive compounds having preferably a functional group such as --SO.sub.2 Cl, --SO.sub.3 H, --SO.sub.3 R, ##STR1## (R, R', R" being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and ##STR2## moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
具有偏好功能基团的光敏化合物,例如--SO.sub.2 Cl,--SO.sub.3 H,--SO.sub.3 R,##STR1##(R,R',R"为烷基)连接通过亚甲基基团的末端苯或萘环和##STR2##基团,在光敏度和热稳定性方面得到改善,因此在光刻胶中有用。