Photochemische Untersuchungen an vicinal-substituierten terti�ren Alkylaziden
作者:Sonja Solar、E. Koch、J. Leitich、P. Margaretha、O. E. Polansky
DOI:10.1007/bf00911163
日期:——
ALCOHOL COMPOUND
申请人:ADEKA CORPORATION
公开号:US20180134739A1
公开(公告)日:2018-05-17
Disclosed is a metal alkoxide compound having physical properties suitable for a material for forming thin films by CVD, and particularly, a metal alkoxide compound having physical properties suitable for a material for forming metallic-copper thin films. A metal alkoxide compound is represented by general formula (I). A thin-film-forming material including the metal alkoxide compound is described as well. (In the formula, R
1
represents a methyl group or an ethyl group, R
2
represents a hydrogen atom or a methyl group, R
3
represents a C
1-3
linear or branched alkyl group, M represents a metal atom or a silicon atom, and n represents the valence of the metal atom or silicon atom.