申请人:Rohm and Haas Electronic Materials Korea Ltd.
公开号:US20170090283A1
公开(公告)日:2017-03-30
New photoresists are provided that are useful in a variety of applications, including negative-tone development processes. Preferred resists comprise a first polymer comprising first units comprising a reactive nitrogen-containing moiety spaced from the polymer backbone, wherein the nitrogen-containing moiety produces a basic cleavage product during lithographic processing of the photoresist composition.
提供了新的光阻剂,可用于各种应用,包括负调色剂开发过程。首选光阻剂包括第一聚合物,其中包括与聚合物骨架间隔的含有反应性氮基团的第一单元,其中氮基团在光刻处理光阻剂组合物期间产生碱性裂解产物。